SEMI® Standard Evaluations

We work with our clients to provide SEMI® standard evaluations and ensure that equipment and documentation meet SEMI® standards.  The following standards are typically evaluated or prepared:

SEMI S2-0818Eb — Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment Evaluations

S8-0218 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S23-1216E - Guide For Energy, Utilities, And Materials Use Efficiency Of Semiconductor Manufacturing Equipment

 

Additional SEMI® Safety Guidelines that can be evaluated or prepared:

 

  • S1-1015 - Safety Guideline for Equipment Safety Labels

  • S2-0818Eb - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

  • S6-0618 - EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

  • S8-0218 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

  • S10-1119 – Safety Guidelines for Risk Assessment and Risk Evaluation Process

  • S13-0113 - Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Semiconductor Manufacturing Equipment

  • S14-0521 - Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

  • S16-0307 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Equipment Disposal

  • S17-0319 - Safety Guideline for Unmanned Transport Vehicle (UTV) Systems

  • S19-0311 (0816) - Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel

  • S21-0818 - Safety Guideline for Worker Protection

  • S22-0718E - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

  • SEMI S23-1216E - Guide For Energy, Utilities, And Materials Use Efficiency Of Semiconductor Manufacturing Equipment

  • S30-0719E - Safety Guideline for the Use of Energetic Materials in the Semiconductor R&D and Manufacturing Processes